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ANFF-NSW (UNSW)
1.2 Fume Cupboard (Wet Processing, Lower East)
1.2.1 Decanted HF process
1.3 Fume Cupboard (Spinner, Lower East)
1.6 MJB3 Aligner
1.7 FEI XL30
1.8 FEI Sirion
1.9 AFM DI3000
2.0 Dektak 3030
2.1 Olympus Microscope
2.3 Denton Oxygen Asher (Lower East)
2.4 Lesker Thermal Evaporator
2.5 P-type Evaporator (Auto 306)
2.6 SET Al Evaporator (Auto 306)
2.7 Dicing Saw
2.8 GaAs ULVAC MILA-500 Annealing Furnace
3.0 Scriber (custom-made)
3.1 Fume Cupboard (Wet Processing, Upper East White)
3.1.1 HF constant temperature bath
3.1.2 TMAH etch
3.2 Fume Cupboard (Spinner, Upper East)
3.2.1. NMP Bath (photomask cleaning)
3.3 Fume Cupboard (Etch, Upper East Grey)
3.4 Clean Anneal Furnace
3.5 GP Anneal Furnace
3.6 Boron Diffusion Furnace
3.7 Phosphorus Diffusion Furnace
3.8 UDOX Furnace
3.9 Clean Si Oxidation Furnace
4.0 IR Backside Aligner
4.1 Karl Suss KSMA Aligner
4.3 Q6000 Aligner
4.4 Dektak 2A
4.5 Kyowa Microscope
4.6 Kyowa Zoom Stereo Microscope
4.7 Nikon Microscope
4.8 PDMS Station
4.9 Jipelec RTA
5.1 Metricon Prism Coupler
5.3 4-point Probe
5.4 Edwards Sputter
5.5 Hollow Cathode RIE
5.6 Edwards Evaporator
5.6 Hollow Cathode PECVD
5.7.1 Oxford RIE
5.7.2 Oxford PECVD
5.9 Raith 150 TWO
6.0 Fume Cupboard (Resist Spinner, West White)
6.1 Fume Cupboard (Dry Processing, West White)
6.2 Fume Cupboard (Wet Processing, West White)
6.3 Fume Cupboard (HF Processing, West White)
6.4 Olympus Stereo Microscope
6.5 Olympus Darkfield Microscope
6.5.1 Dektak 150
6.5.2 MA6 Aligner
6.5.3.1 GP ULVAC MILA-500 Annealing Furnace
6.5.5 Oxygen Asher (West White)
6.5.6 Savannah ALD
6.5.8 Muffle Furnace
6.6 Fume Cupboard (Wet Processing, West Grey)
6.7 STS ICP-DRIE
6.8 K and S Au Ball Bonder
6.8.1 TPT HB10 Thermosonic Au Ball Bonder
6.8.2 TPT HB10 Thermosonic Al Wedge Bonder
6.9 K and S Al Wedge Bonder
7.0 Digital Au Ball Bonder
7.1 Karl Suss Wafer Scriber
7.2 Lesker PVD 75 (GP)
7.2.1 Lesker PVD 75 (Si)
7.2.2 HHV Sputterer
7.3 Woollam M2000 Ellipsometer
7.5 Cascade Probe Station
8.1 Fume Cupboard (Wet Processing, South Lab)
8.2 Veeco Gen930 III-V MBE
9.0 Fume Cupboard (Wet Processing, South Laser Lab)
9.1 Pascal LMBE Chamber A
9.2 Pascal LMBE Chamber B
AlphaPlasma Asher
Bruker Dimension Edge AFM
DektakXT
DMO ML3 Pro direct writer
F and S Bondtech 53XX-BDA wire bonder
GP RIE
MBE sample preparation
OEG MR200 diamond scriber
Olympus DSX1000 Digital Microscope
Oxford PlasmaPro 100 Cobra ICP RIE
Parylene Coater
Picosun R-200 ALD system
Raith Pioneer TWO
Tystar LPCVD Furnace System
Tystar LPCVD Furnace Tube 1 (Si3N4)
Tystar LPCVD Furnace Tube 2 (p-doped PolySi)
Tystar LPCVD Furnace Tube 3 (n-doped PolySi)
West Lab HF fumehood
10.1 Fume Cupboard (Wet Processing, Ion Implanter)
10.1 IBS Ion Implanter
11 COMSOL Multiphysics
11.1 Woollam WVASE32
11.2 Raith Software
ANFF-NSW Services
Consulting
Consumable Entries
COVID-19 related consultation
Data Analysis
Mask design
Pattern design
Resource Groups
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