1.2 Fume Cupboard (Wet Processing, Lower East)
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EoY shutdown |
1.2.1 Decanted HF process
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EoY shutdown |
1.3 Fume Cupboard (Spinner, Lower East)
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EoY shutdown |
1.6 MJB3 Aligner
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EoY shutdown |
1.7 FEI XL30
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EoY shutdown |
1.8 FEI Sirion
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EoY shutdown |
2.1 Olympus Microscope
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EoY shutdown |
2.3 Denton Oxygen Asher (Lower East)
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EoY shutdown |
2.4 Lesker Thermal Evaporator
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EoY shutdown |
2.5 P-type Evaporator (Auto 306)
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EoY shutdown |
2.6 SET Al Evaporator (Auto 306)
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EoY shutdown |
2.7 Dicing Saw
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EoY shutdown |
2.8 GaAs ULVAC MILA-500 Annealing Furnace
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EoY shutdown |
3.0 Scriber (custom-made)
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EoY shutdown |
3.1 Fume Cupboard (Wet Processing, Upper East White)
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EoY shutdown |
3.1.1 HF constant temperature bath
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EoY shutdown |
3.1.2 TMAH etch
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EoY shutdown |
3.2 Fume Cupboard (Spinner, Upper East)
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EoY shutdown |
3.2.1. NMP Bath (photomask cleaning)
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EoY shutdown |
3.4 Clean Anneal Furnace
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EoY shutdown |
3.5 GP Anneal Furnace
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EoY shutdown |
3.6 Boron Diffusion Furnace
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EoY shutdown |
3.7 Phosphorus Diffusion Furnace
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EoY shutdown |
3.8 UDOX Furnace
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EoY shutdown |
3.9 Clean Si Oxidation Furnace
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EoY shutdown |
4.4 Dektak 2A
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EoY shutdown |
4.5 Kyowa Microscope
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EoY shutdown |
4.6 Kyowa Zoom Stereo Microscope
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EoY shutdown |
4.7 Nikon Microscope
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EoY shutdown |
4.8 PDMS Station
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EoY shutdown |
4.9 Jipelec RTA
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EoY shutdown |
5.3 4-point Probe
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EoY shutdown |
5.4 Edwards Sputter
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EoY shutdown |
5.6 Edwards Evaporator
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EoY shutdown |
5.7.1 Oxford RIE
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EoY shutdown |
5.7.2 Oxford PECVD
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SGS offine |
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5.9 Raith 150 TWO
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EoY shutdown |
6.0 Fume Cupboard (Resist Spinner, West White)
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EoY shutdown |
6.1 Fume Cupboard (Dry Processing, West White)
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EoY shutdown |
6.2 Fume Cupboard (Wet Processing, West White)
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EoY shutdown |
6.3 Fume Cupboard (HF Processing, West White)
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EoY shutdown |
6.4 Olympus Stereo Microscope
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EoY shutdown |
6.5 Olympus Darkfield Microscope
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EoY shutdown |
6.5.1 Dektak 150
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EoY shutdown |
6.5.2 MA6 Aligner
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EoY shutdown |
6.5.3.1 GP ULVAC MILA-500 Annealing Furnace
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EoY shutdown |
6.5.6 Savannah ALD
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Inner heater temp OOC, need to replace RTD. |
6.5.8 Muffle Furnace
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EoY shutdown |
6.6 Fume Cupboard (Wet Processing, West Grey)
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EoY shutdown |
6.7 STS ICP-DRIE
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EoY shutdown |
6.8.1 TPT HB10 Thermosonic Au Ball Bonder
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EoY shutdown |
6.9 K and S Al Wedge Bonder
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EoY shutdown |
7.2 Lesker PVD 75 (GP)
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EoY shutdown |
7.2.1 Lesker PVD 75 (Si)
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7.2.2 HHV Sputterer
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EoY shutdown |
7.3 Woollam M2000 Ellipsometer
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EoY shutdown |
7.5 Cascade Probe Station
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EoY shutdown |
8.1 Fume Cupboard (Wet Processing, South Lab)
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EoY shutdown |
8.2 Veeco Gen930 III-V MBE
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EoY shutdown |
9.0 Fume Cupboard (Wet Processing, South Laser Lab)
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EoY shutdown |
9.1 Pascal LMBE Chamber A
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EoY shutdown |
9.2 Pascal LMBE Chamber B
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EoY shutdown |
AlphaPlasma Asher
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EoY shutdown |
Bruker Dimension Edge AFM
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EoY shutdown |
DektakXT
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EoY shutdown |
DMO ML3 Pro direct writer
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EoY shutdown |
F and S Bondtech 53XX-BDA wire bonder
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EoY shutdown |
GP RIE
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EoY shutdown |
MBE sample preparation
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EoY shutdown |
OEG MR200 diamond scriber
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EoY shutdown |
Olympus DSX1000 Digital Microscope
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EoY shutdown |
Oxford PlasmaPro 100 Cobra ICP RIE
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Parylene Coater
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EoY shutdown |
Picosun R-200 ALD system
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end of year shut down |
Raith Pioneer TWO
|
EoY shutdown |
Tystar LPCVD Furnace System
|
EoY shutdown |
Tystar LPCVD Furnace Tube 1 (Si3N4)
|
EoY shutdown |
Tystar LPCVD Furnace Tube 2 (p-doped PolySi)
|
EoY shutdown |
Tystar LPCVD Furnace Tube 3 (n-doped PolySi)
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EoY shutdown |
10.1 Fume Cupboard (Wet Processing, Ion Implanter)
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EoY shutdown |
10.1 IBS Ion Implanter
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EoY shutdown |
11 COMSOL Multiphysics
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EoY shutdown |
11.1 Woollam WVASE32
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EoY shutdown |
11.2 Raith Software
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EoY shutdown |